Literatura pojednávající o iontové implantaci.

 

 
  1. Bohr, n., Mat. Fys. Medd. Dan. Vid. Selsk. 18 (1948), č. 8
  2. Lindhard, J. - Scharff, M., Phys. Rev. 124 (1961), 128
  3. Lindhard, J. - Scharff, M. - Schiott, H., Mat. Fys . Medd. Dan. Vid. Selsk. 33 (1963), 1
  4. Lindhard, J., Mat. Fys. Medd. Dan. Vid. Selsk. 34 (1965) č. 14
  5. Shockley, W., V.S. Patent 2 787564 (1957)
  6. Gibbons, J.F., Proc. IEEE 55 (1968), 295
  7. Firsov, O.B., ®ETF 36 (1959), 1517
  8. Gibbons, J.F. - Johnson, W.S. - Mylroie, S.W.: Projected Range Statistics. Dowden, Hutchinson and Ross, Inc., Stroudsburg 1975
  9. Mayer, J.W. - Eriksson, L. - Davies, J.A.: Ion Implantation in Semiconductors. Academic Press, New York 1970
  10. Kinchin, G.H. - Pease, R.S., Rep. Prog. Phys. 18 (1955), 1
  11. Vendik, O.G. - Gorin, Ju. N. - Popov, V.F.: Korposkuljarno-fotonnaja technologija. Vysąaju ąkola, Moskva 1984
  12. Dearnaley, G. - Freeman, J.H. - Nelson, R.S. - Stephen, J.: Ion Implantation. North-Holland Publishing Co., Amsterdam 1973
  13. Ion Implantation Range and Energy Deposition Distributions. IFI/Plenum, New York 1975
  14. Ion Implantation, Gordon and Breach, Science Publishers Ltd., London 1971
  15. Ionnaja implantacija v poluprovodniki i drugije materialy. Mir, Moskva 1980
  16. Těchnologija ionnogo legirovanija. Sovětskoje radio, Moskva 1974
  17. Kumachov, M.A. - Komarov, F.F.: Energetičeskije potěri i proběgi ionov v tvěrdych tělach. Nakl BGU, Minsk 1979
  18. Townsend, P.D. - Kelly, J.C. - Hartley, N.E.W.: Ion Implantation , Sputtering and Their Applications. Academic Press, London, 1976
  19. Applicationf of Ion Beams to materials. Institut of Physics, Bristol 1976
  20. Winterbon, K.B., Rad. Eff. 13 (1972), 215
  21. Biersack, J.P., Nucl. Instrum. And Methods 182/183 (1981), 199
  22. Ion Implantation Techniques. Ed. Ryssel, H.-Glawisching, H., Spinger-Verlag, Berlin 1982
  23. Ryssel, H. - Ruge, I.: Ionnaja implantacija. Nauka, Moskva 1983
  24. Abrojan, I.A. - Andronov, A.N. - Titov, A.I.: Fizičeskije osnovy elektronnoj i ionnoj technologii. Vysąaja ąkola, Moskva 1984
  25. Burenkov, A.F. - Komarov, F.F. - Kumachov, M.A. - Těmkin, M.M.: Tablicy parametrov prostranstvernnogo raspredelenija ionnoimplantirovannych primesej. BGU, Minsk 1980
  26. Ion Implantation. Ed. Hirvonen, J.K., Academie Press, New York, 1980
  27. Certer, G. - Colligon, J.S.: Ion Bombardment of solids. Heinemann, London 1968
  28. Gibbons, J.F., Proc. IEEE 60 (1972), 1062
  29. Sigmund, P. - Sanders, J.B., Proc. Int. Conf. of Appl. of Ion Beams to Sem. Tech., Grenoble 1967, 215
  30. Thompson, M.W., Phil. Mag. 18 (1968), 377
  31. Sigmund, P., Phys. Rev. 184 (1969), 383
  32. Stewart, A.D.G. - Thompson, M.W., J. Mat Sci. 4 (1969), 56
  33. Hermanne, N. - Art. A., Rad. Effects 5 (1970), 203
  34. Lian, Z.L. - Hayer, J.W., J. Vac. Sci. Technol. 15 (1978), 1629
  35. Hartley, N.E.W.: Cit. 26, str. 321
  36. Li, H.T. - Lin, P.S. - Chang, S.C. - Lú, H.C. - Wang, H.H. - Tao, K., Nucl. Instrum. and Methods 182/183 (1981), 915
  37. Ion Implantation Metellurgy. Met. Soc. of AIME, Warrendale, Pa., 1980
  38. Singer, I.L. - Bolster, R.N., Cit. 37, str. 116
  39. Herman, H., Nucl. Instrum. and Methods 182/183 (1981), 887
  40. Hu W.W. - Herman, H. - Clayton, C.R. - Kozubowski, J. - Kant, R.A. - Hiroven, J.K. - Mac Crone ,R.K.: Cit 37, str. 92
  41. Herman, H. - Hu, W.W. - Clayton, C.R.- Hiroven, J.K. - Kant, R.A. - Mac Crone, R.K. Thin Solid Films 73 (1980), 189
  42. Hu, W.W. - Clayton, C.R. - Herman, H. - Hiroven, H.K., Scr. Metall. 12, (1978), 697
  43. Chakrabortty, S.B. - Kujore, A. - Starke, E.A. - Leg, K.O., IEEE Trans, Nucl. Sci. 28 (1981), 1812
  44. Hartley, N.E.W. - Dearnaley, G. - Turner, J.F.: Implantation in Semiconductors and other Materials. Plenum Press, New York, 1973, str. 423
  45. Carosella, C.A. - Singer, I.L. - Bowers , R.C. - Gosset, C.R.: Cit. 37, str. 103
  46. Singer, I.L. - Carossela, C.A. - Reed, J.R., Nucl. Instrum. and Methods 182/183 (1981), 923
  47. Iwaki, M. - Hagasaki, H. - Kohno, A. - Namba, S. - Yoshida, K. - Soda , N., Radiat. Eff. 49 (1980)
  48. Dearnaley, G.: Cit. 37, str. 1
  49. Knapp, J.A. - Folstadt, D.M. - Picraux, S.T.: Cit. 37, str. 152
  50. Singer, I.L. - Bolster, R.N. - Carosella, C.A., Thin Solid Films 73 (1980), 283
  51. Sheasby, J.S., Wear 55 (1974), 345
  52. Low-energy Ion Beams. Inst. Phys. Conf. Ser. No. 54, 1980
  53. Dearnaley, G.-Goode, P.D.: Cit. 52, str. 26
  54. Gardner, P.R.- Dearnaley, G. - Rosenbaum, S., Surf. Eng. 3 (1987), 203
  55. Hubler, G.K., NRL Hem. Rep. 5928, 1987
  56. Mc Hargue, C.J., Int. Met. Rev. 31 (1986), 49
  57. Telford, D.G. - Boston, M.E. v Designing with Titanium, The Institute of Metals. London, 1986, str. 151
  58. Pope , L.E. - Picraux, S.T. - Follstaedt, D.M. - Knapp, J.A. - Yost, F.G., Coat. Bimet. Agres. Env., Conf. Proc., Am. Soc. Met., 1985, str. 179
  59. Surface Treating and Coating. Metal Progress, 1986, str. 45
  60. Armini, A., Ind. Heat. 1986, str. 17
  61. Onate, J.I. - Dennis, J.K - Hamilton, S., Trans. IMF 65 (1987), 99
  62. Hubler, G.K. v Metastable materials formation by ion implantation, vol. 7, Elsevier, 1982, str. 341
  63. Ion Implantation Metalurgy v Enc. Mat. Sc. Eng., Vol. 3, Pergamon Press, Oxford, 1986, str. 2409
  64. Hubler, G.K. - Smidt, F.A., Nucl. Instrum. and Methods B 7/8 (1985), 151
  65. Dearnaley, G. - Hartley, N.E.W., Met. Coat. 1978, Proc. Int. Conf., San Francisco, April 3-7, 1978, str. 215
  66. Dearnaley, G., Nucl. Instrum. and Methods B 7/8 (1985), 158
  67. Dearnaley, G., Surf. Eng. 2 (1986), 213
  68. Dearnaley, G. - Goode, P.D. - Minter, F.J. - Peacock, A.T. - Hughes, W. - Proctor, G.W., Vacuum 36 (1986), 807
  69. Dearnaley, G., Rad, Eff. 63 (1982), 25
  70. Dearnaley, G. - Minter, F.J. -Rol, P.K. Saint, A. - Thompson, V., Nucl. Instrum. and Methods B 7/8 (1985), 188
  71. Dearnaley, G., Mat. Sc. Eng. 69 (1985), 139
  72. Hartley, N.E.V., Surf. Jour. 10 (1979), no. 1
  73. Dearnaley, G. v Ion Impantation into Metals. Ed. Ashworth, V. et al. Pergamon Press, Oxford and New York, 1982, str. 180
  74. Goode, P.D., AERE Harwell - R 11643, 1985
  75. Lo Russo, E. - Mazzoldi, P. - Scotoni, I. - Tosello, C. - Tosto, S., Appl. Phys. Lett. 34 (1979), 627
  76. Iwaki, M. - Yabe, K. - Suzuki, M. - Nishimura, O., Nucl. Instrum. and Methods B 19/20 (1987), 150
  77. Singer, I.L., Appl. Surf. Sci 18 (1984), 28
  78. Bennett, M.J. - Bellamy, B.A. - Meadows, N. - Eyre, N.J., Mat. Sci. Eng. 69 (1985), 359
  79. Pivin, J.C. - Roques-Carmes, C. - Chaumont, J. - Bernas, H., Corros. Sci. 20 (1980), 947
  80. Bennett, M.J. - Houlton, M.R. - Dearnaley, G., Corros. Sci. 20 (1980), 69
  81. Yang, C.H. - Welsch, G.E. - Mitchell, T.E., Mat. Sci. Eng. 69 (1985), 351
  82. Ashworth, V. - Grant, W.A. - Proctor, R.P.M., Corros. Sci. 16 (1976), 775
  83. Ashworth, V. - Grant, W.A. - Proctor, R.P.M. - Baxter, D., Corros. Sci. 17 (1977), 347
  84. Ashworth, V. - Grant, W.A. - Proctor, R.P.M. - Wright, E.J., Corros. Sci. 18 (1978), 681
  85. Bonora, P.L. - Cerisola, G. - Fedrizzi, L. - Tosello, C., Mat. Sci. Eng. 69 (1985), 283
  86. Kim, H.J. - Carter, W.B. - Hochman, R.F. - Meletis, E.I., Mat. Sci. Eng. 69 (1985), 297
  87. Lorensen, N.R. - Diegle, R.B. - Picraux, S.T., Corrosion 43 (1987), 2
  88. Naka, M. - Hashomoto, K. - Masumoto, T., Corrosion 32 (1976), 146
  89. Sartwell, B.D., Thin Sol. Films 54 (1978), 233
  90. Vasiljev, V.Ju. - Kuzmenko, T.G. - Bajankin, V.Ja. - ©abanova, I.N. - Guseva, M.I. - Vladimirov, B.G., Zaąč. met. 23 (1987), 487
  91. Čigirinskaja, L.A. - Guseva, M.V. - Vladimirov, B.G. - Tomanov, N.D. - Černova, G.P.- Bogomolov, D.B., - Gorodeckij, A.E. - Zalavutdinov, R.Ch. - Manskaja, V.D., Zaąč. met. 23 (1987), 588
  92. Granta, R.D. - De Crosta, M.A. - Mc Intyre, J.F. - Leidheiser, H., Jr., Ind. Eng. Chem. Res. 26 (1987), 427
  93. Pavlov, P.V. - Tetelbaum D.I. - Kurilčik, E.V. - Romanov, I.G., Zaąč. met. 23 (1987), 645
  94. Dearnaley, G., Vacuum 36 (1986), 807
  95. Munn, P. - Wolf, G.K., Mat. Sci. Eng. 69 (1985), 303
  96. Akavipat, S. - Hale, E.B. - Habermann, C.E. - Hagans, P.L., Mat. Sci. Eng. 69 (1985), 311
  97. Armini, A., Ind. Heat., January 1986, str. 17
  98. Khanna, R. - Tyagi, A.K. - Nandekar, R.V., Scr. Met. 20 (1986), 181
  99. Ashworth, V. - Grant, W.A. - Procter, R.P.M., Ind. Eng. Chem. 17 (1978), 176
  1. . Pivin, J.C. - Morvan, J. - Mairey, D. - Mignot, J., Scr. met. 17 (1983), 179